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Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator

Title
Self-refreshing characteristics of an airborne particle sensor using a bridged paddle oscillator
Author
이승백
Keywords
MEMS; Airborne particle sensor; Self-refreshing; Mass detection
Issue Date
2016-05
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 68, NO 10, Page. 1170-1175
Abstract
We report on the self-refreshing characteristics of a micromachined airborne particle sensor. The sensor consists of a bridge-type beam having an oscillating paddle-type particle collector at its center. When a positive potential is applied to the paddle, the sensor is able to attract and collect negatively charged airborne particles while oscillating close to its resonant frequency and thereby measure their density from the change in the oscillating phase at similar to 10 pg resolution. When the applied potential is removed, the collected particles are detached from the sensor due to momentum transfer from the oscillating paddle, thus demonstrating a self-refreshing capability.
URI
https://link.springer.com/article/10.3938%2Fjkps.68.1170http://repository.hanyang.ac.kr/handle/20.500.11754/71033
ISSN
0374-4884; 1976-8524
DOI
10.3938/jkps.68.1170
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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