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전기탐침을 이용한 DC플라즈마에서의 음이온 및 금속 먼지 영향 조사

Title
전기탐침을 이용한 DC플라즈마에서의 음이온 및 금속 먼지 영향 조사
Other Titles
Effect of negative ions and metal dusts on DC plasma by electric probe
Author
오혜택
Advisor(s)
정규선
Issue Date
2018-02
Publisher
한양대학교
Degree
Master
Abstract
The negative ion plasma was generated by adding of oxygen (O2) gas to the background plasma of argon (Ar) produced by the DC filament discharge. The filament is made of Thoriated tungsten wire. The heating current was 23A and the plasma was generated at 100V / 0.4A discharge condition. Plasma parameters were typical plasma parameters of the argon plasma n0 ~ 109 cm3, Te ~ 2eV. The amount of negative ion was controlled by comparing the flow rate of oxygen with the flow rate of argon. The amount of dust was adjusted to vary the amplitude of the injector frequency so that the dust was released into the plasma. A cylindrical electric probe is used to determine the plasma parameter by comparing normal current - voltage (I-V) curve with and without negative charges negative ions or dusts. Addition of the negative charge to the plasma makes the electron saturation currents dramatically, while ion saturation currents are charged slightly, which indicates the increase of negative ion density and charge of electron temperature. As a result of the negative ion and dust test of the DC plasma, it was confirmed that the influence of the dust on the plasma is similar to the negative ion on the plasma due to the change of plasma parameters.
URI
http://www.dcollection.net/handler/hanyang/000000105580http://repository.hanyang.ac.kr/handle/20.500.11754/68491
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > ELECTRICAL ENGINEERING(전기공학과) > Theses (Master)
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