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Control of ZnO thin film surface by ZnS passivation to enhance photoluminescence

Title
Control of ZnO thin film surface by ZnS passivation to enhance photoluminescence
Author
구상만
Keywords
Atomic layer deposition; Zinc oxide; Zinc sulfide; Photoluminescence; Multi-layer
Issue Date
2012-05
Publisher
Elsevier Science B.V., Amsterdam.
Citation
Thin Solid Films, Vol.52, No.6 [2012], p1832-1836
Abstract
To enhance the optical property of zinc oxide (ZnO) thin film, zinc sulfide (ZnS) thin films were formed on the interfaces of ZnO thin film as a passivation and a substrate layer. ZnO and ZnS thin films were deposited by atomic layer deposition (ALD) using diethyl zinc, H2O, and H2S as precursors. Investigations by X-ray diffraction and transmission electron microscopy showed that ZnS/ZnO/ZnS multi-layer thin films with clear boundaries were achieved by ALD and that each film layer had its own polycrystalline phase. The intensity of the photoluminescence of the ZnO thin film was enhanced as the thickness of the ZnO thin film increased and as ZnS passivation was applied onto the ZnO thin film interfaces.
URI
http://www.sciencedirect.com/science/article/pii/S0040609011016130?via%3Dihubhttp://hdl.handle.net/20.500.11754/66974
ISSN
0040-6090
DOI
10.1016/j.tsf.2011.08.108
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > CHEMICAL ENGINEERING(화학공학과) > Articles
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