Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이성재 | - |
dc.date.accessioned | 2018-04-03T07:51:05Z | - |
dc.date.available | 2018-04-03T07:51:05Z | - |
dc.date.issued | 2014-09 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, 2014, 105(10), P.103101-1~103101-5 | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.issn | 1077-3118 | - |
dc.identifier.uri | http://aip.scitation.org/doi/abs/10.1063/1.4895119 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/57363 | - |
dc.description.abstract | We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05 x 10(-18) g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones. (C) 2014 AIP Publishing LLC. | en_US |
dc.description.sponsorship | The research was supported by the Converging Research Center Program through the Ministry of Education, Science and Technology (2013K000344), by a Korea Research Foundation Grant funded by the Korean Government (KRF-2007-314-C00064), and by the Ministry of Trade, Industry and Energy (Grant No. 10043371). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA | en_US |
dc.subject | MEMS RESONATORS | en_US |
dc.subject | NANOELECTROMECHANICAL SYSTEMS | en_US |
dc.subject | QUALITY FACTORS | en_US |
dc.subject | FABRICATION | en_US |
dc.subject | CANTILEVERS | en_US |
dc.title | The control of oscillation mode in silicon microbeams using silicon nitride anchor | en_US |
dc.type | Article | en_US |
dc.relation.volume | 105 | - |
dc.identifier.doi | 10.1063/1.4895119 | - |
dc.relation.page | 103101-103101 | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.contributor.googleauthor | Baek, In-Bok | - |
dc.contributor.googleauthor | Lee, Bong Kuk | - |
dc.contributor.googleauthor | Kim, Yarkyeon | - |
dc.contributor.googleauthor | Ahn, Chang-Geun | - |
dc.contributor.googleauthor | Kim, Young Jun | - |
dc.contributor.googleauthor | Yoon, Yong Sun | - |
dc.contributor.googleauthor | Jang, Won Ik | - |
dc.contributor.googleauthor | Kim, Hakseong | - |
dc.contributor.googleauthor | Lee, Sang Wook | - |
dc.contributor.googleauthor | Lee, Seongjae | - |
dc.relation.code | 2014025338 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF NATURAL SCIENCES[S] | - |
dc.sector.department | DEPARTMENT OF PHYSICS | - |
dc.identifier.pid | leesj | - |
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