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The control of oscillation mode in silicon microbeams using silicon nitride anchor

Title
The control of oscillation mode in silicon microbeams using silicon nitride anchor
Author
이성재
Keywords
MEMS RESONATORS; NANOELECTROMECHANICAL SYSTEMS; QUALITY FACTORS; FABRICATION; CANTILEVERS
Issue Date
2014-09
Publisher
AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Citation
APPLIED PHYSICS LETTERS, 2014, 105(10), P.103101-1~103101-5
Abstract
We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05 x 10(-18) g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones. (C) 2014 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/abs/10.1063/1.4895119http://hdl.handle.net/20.500.11754/57363
ISSN
0003-6951; 1077-3118
DOI
10.1063/1.4895119
Appears in Collections:
COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
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