Improvement in the Bias Stability of Zinc-Tin Oxide Thin-Film Transistors by Hafnium Doping
- Title
- Improvement in the Bias Stability of Zinc-Tin Oxide Thin-Film Transistors by Hafnium Doping
- Author
- 박종완
- Keywords
- Amorphous oxide semiconductor; hafnium-zinc-tin oxide; ZnO-based TFT; negative-bias temperature instability (NBTI)
- Issue Date
- 2013-08
- Publisher
- Springer Science + Business Media
- Citation
- JOURNAL OF ELECTRONIC MATERIALS , 권: 42 , 호: 8, 페이지: 2470-2477
- Abstract
- The influence of hafnium (Hf) doping on negative-bias temperature instability in zinc-tin oxide thin-film transistors was studied. Hafnium-zinc-tin oxide TFTs exhibited a turn-on voltage (V (ON)) that shifted from 0 V to -1 V with negligible changes in the subthreshold swing and field-effect mobility after 3 h of total stresses. The enhanced improvement of the V (ON) shift (Delta V (ON)) was attributed to the reduction in the interface trap density, which may result from the suppression of oxygen-vacancy-related defects by the Hf ions.
- URI
- https://link.springer.com/article/10.1007/s11664-013-2618-8http://hdl.handle.net/20.500.11754/54007
- ISSN
- 0361-5235
- DOI
- 10.1007/s11664-013-2618-8
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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