| 2015-04 | Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography | 박진구 |
| 2013-04 | Modification of Diamond Conditioner with V-SAM Coatings for Corrosion Prevention During Metal CMP | 박진구 |
| 2015-03 | Multi-Stack Extreme-Ultraviolet Pellicle with Out-of-Band Reduction | 박진구 |
| 2015-10 | Multistack structure for an extreme-ultraviolet pellicle with out-of-band radiation reduction | 박진구 |
| 2011-10 | Nano Gas Cluster Dry Cleaning for Damage Free Particle Removal | 박진구 |
| 2012-07 | Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning | 박진구 |
| 2013-01 | Non Destructive Nanoparticle Removal from Submicron Structures Using Megasonic Cleaning | 박진구 |
| 2015-01 | Novel one-step route to induce long-term lotus leaf-like hydrophobicity in polyester fabric | 박진구 |
| 2013-04 | On the mechanism of material removal by fixed abrasive lapping of various glass substrates | 박진구 |
| 2013-04 | Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers | 박진구 |
| 2017-01 | Preparation of a high hydrophobic aluminium surface by double zincating process | 박진구 |
| 2015-10 | Prevention of Metal Contamination in Sub 50 nm SC1 Cleaning Process | 박진구 |
| 2013-08 | Quantitative Analysis of H5N1 DNA Hybridization on Nanowell Array Electrode | 박진구 |
| 2011-04 | Random yield loss during wafer cleaning | 박진구 |
| 2018-10 | Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents | 박진구 |
| 2015-08 | Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage | 박진구 |
| 2013-01 | Removal of UV cured resin using hybrid cleaning method | 박진구 |
| 2014-01 | Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography | 박진구 |
| 2013-01 | Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study | 박진구 |
| 2013-01 | Role of mask patterns in fabrication of Si nanotip arrays | 박진구 |
| 2017-01 | Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs | 박진구 |
| 2011-05 | A Self-Assembled Monolayer-Based Micropatterned Array for Controlling Cell Adhesion and Protein Adsorption | 박진구 |
| 2013-08 | Shockwave-induced deformation of organic particles during laser shockwave cleaning | 박진구 |
| 2013-01 | Study of highly selective and sensitive microarray structure based on hydrophilic/hydrophobic SAMS | 박진구 |
| 2015-10 | Submicron Particle Removal during FPD Oxide TFT Process | 박진구 |
| 2012-08 | 미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교 | 박진구 |
| 2014-07 | 이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발 | 박진구 |
| 2012-03 | 텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가 | 박진구 |
| 2015-09 | 포토마스크 펠리클 제조를 위한 Aluminum Frame 표면 세정공정 연구 | 박진구 |
