Influence of molybdenum source/drain electrode contact resistance in amorphous zinc-tin-oxide (a-ZTO) thin film transistors
- Title
- Influence of molybdenum source/drain electrode contact resistance in amorphous zinc-tin-oxide (a-ZTO) thin film transistors
- Other Titles
- drain electrode contact resistance in amorphous zinc-tin-oxide (a-ZTO) thin film transistors
- Author
- 박종완
- Keywords
- Amorphous materials; Semiconductors; Thin films; Sputtering; Electrical properties
- Issue Date
- 2014-10
- Publisher
- Elsevier Science B.V., Amsterdam.
- Citation
- MATERIALS RESEARCH BULLETIN, 58권,특별호 SI, 174-177
- Abstract
- This paper investigates the feasibility of a low-resistivity electrode material (Mo) for source/drain (S/D) electrodes in thin film transistors (TFTs). The effective resistances between Mo source/drain electrodes and amorphous zinc tin-oxide (a-ZTO) thin film transistors were studied. Intrinsic TFT parameters were calculated by the transmission line method (TLM) using a series of TFTs with different channel lengths measured at a low source/drain voltage. The TFTs fabricated with Mo source/drain electrodes showed good transfer characteristics with a field-effect mobility of 10.23 cm(2)/Vs. In spite of slight current crowding effects, the Mo source/drain electrodes showed good output characteristics with a steep rise in the low drain-to-source voltage (V-DS) region. (C) 2014 Elsevier Ltd. All rights reserved.
- URI
- http://dx.doi.org/10.1016/j.materresbull.2014.05.009http://hdl.handle.net/20.500.11754/52361
- ISSN
- 0025-5408
- DOI
- 10.1016/j.materresbull.2014.05.009
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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