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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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2017-03
CD Error Caused by Aberration and Its Possible Compensation by Optical Proximity Correction in Extreme-Ultraviolet Lithography
오혜근
2017-01
Impact of transmission non-uniformity of a wrinkled EUV pellicle for N5 patterning under various illuminations
오혜근
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CD uniformity
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EUV pellide
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Pellicle
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Pellicle deformation
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Transmission non-uniformity
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