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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 301-301 of 301 (Search time: 0.002 seconds).
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2008-02
Double Ionization of H- Ions by Electron Impact in Solar Atmosphere
정영대
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-Author
94
정영대
89
오혜근
34
권영헌
31
정희준
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강보수
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김옥경
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홍주유
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Lithography
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lithography
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Lithography simulation
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Resist reflow process
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Navier-Stokes equation
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resist reflow process
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32 nm line and space half-pitch
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Contact hole
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ellipsometry
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EUV lithography
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2009
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