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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 31-40 of 301 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2006-11
Transport Properties of Coupled Semiconductor Quantum Dots
정희준
2006-11
Semiconductor Quantum Structures for Infrared Detection Using Nano-Patterned Grating Geometry
정희준
2005-06
Calibration-Free Multichannel Ellipsometry for Retardance Measurement
김옥경
2006-07
Quantum and plasma screening effects on electron–hydrogen polarization transport collisions in partially ionized plasmas
김옥경
2006-11
Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
정희준
2006-11
Investigation of optimum biasing and undercut for single trench alternating phase shift mask in 193 nm lithography
오혜근
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-Author
94
정영대
89
오혜근
34
권영헌
31
정희준
27
강보수
10
김옥경
10
홍주유
3
손승우
2
권영현
1
권영일
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-Subject
15
Lithography
11
lithography
10
Lithography simulation
10
Resist reflow process
9
Navier-Stokes equation
7
resist reflow process
6
32 nm line and space half-pitch
6
Contact hole
5
ellipsometry
5
EUV lithography
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-Date issued
45
2009
68
2008
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2007
60
2006
53
2005
31
2004
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