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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 131-140 of 141 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2003-02
Lithography Process Optimization Simulator for an Illumination System
오혜근
2003-02
Resist Pattern Collapse Modeling for Smaller Features
오혜근
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
오혜근
2004-06
Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall
오혜근
2003-11
Simulation Parameter Extraction Using Distribution Processing and Fast SEM Profile Digitization
오혜근
2002-11
Resolution Enhancement Method Using an Apodized Mask
오혜근
2002-04
Modification of the Development Parameter for a Chemically Amplified Resist SimulatorModification of the Development Parameter for a Chemically Amplified Resist SimulatorModification of the Development Parameter for a Chemically Amplified Resist SimulatorModification of the Development Parameter for a Chemically Amplified Resist SimulatorModification of the Development Parameter for a Chemically Amplified Resist SimulatorModification of the development parameter for a chemically amplified resist simulator
오혜근
2003-05
A single zone azimuth calibration for rotating compensator multichannel ellipsometry
오혜근
2000-02
Soft bake effect in 193-nm chemically amplified resist
오혜근
2000-02
감광제 고유의 ABC 노광변수 추출 시뮬레이터
오혜근
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lithography
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ellipsometry
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Chemically amplified resist
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Lithography simulation
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Resist reflow process
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Aerial image
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