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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 121-130 of 141 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2002-09
패턴 Top Rounding 효과를 고려한 패턴 붕괴 전산모사
오혜근
2002-09
신경망을 이용한 공정 오차 보정
오혜근
2003-02
Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer
오혜근
2003-02
A Simple Optical System Parameter Optimization Method by Comparing the Critical Dimension
오혜근
2003-02
The Extraction of Exposure Parameters by Using Neural Networks
오혜근
2003-02
Simulation of Complex Resist Pattern Collapse with Mechanical Modeling
오혜근
2004-11
Angular dependency of off-axis illumination on 100 nm width pattern printability for extreme ultraviolet lithography: Ru/Mo/Si reflector system
오혜근
2003-02
A practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer
오혜근
2003-02
Prediction of the Critical Dimensions by Using a Threshold Energy Resist Model
오혜근
2003-02
A Practical Method of Extracting the Photoresist Exposure Parameters by Using A Dose-To-Clear Swing Curve
오혜근
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Lithography
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lithography
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ellipsometry
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Simulation
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Chemically amplified resist
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Lithography simulation
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Resist reflow process
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Aerial image
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EUV lithography
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EUV mask
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