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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 111-120 of 141 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2002-01
기판 단차에 따른 감광제의 분포와 선폭 변화
오혜근
2002-01
화학 증폭형 감광제의 전산모사를 위한 PEB 변수 추출
오혜근
2003-12
Aerial image prediction for mask defect in extreme ultraviolet lithography
오혜근
2002-11
Threshold Energy Resist Model for CD Prediction
오혜근
2002-11
Process Proximity correction by using neural networks
오혜근
2002-11
Resist pattern collapse with top rounding resist profile
오혜근
2002-11
Rotating Compensator Spectroscopic Ellipsometry 의 개발 및 응용
오혜근
2003-06
Threshold energy resist model for critical dimension prediction
오혜근
2003-06
Resist Pattern Collapse with Top Rounding Resist Profile
오혜근
2002-11
Process proximity correction by using neural networks
오혜근
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Lithography
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lithography
8
ellipsometry
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
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Resist reflow process
5
Aerial image
5
EUV lithography
5
EUV mask
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