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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 11-20 of 33 (Search time: 0.004 seconds).
Item hits:
Issue Date
Title
Author(s)
2008-11
Solving the Navier-Stokes Equation for Thermal Reflow
오혜근
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안일신
2004-11
Bulk effects of the thermal flow resists
오혜근
2004-11
A study of process parameter control for nanopattern
오혜근
2015-04
Patterning dependence on the mask defect for extreme ultraviolet lithography
오혜근
2007-02
Characteristics and prevention of pattern collapse in EUV lithography
오혜근
2002-12
Process Study of a 200 nm Laser Pattern Generator
오혜근
2012-10
Temperature behavior of pellicles in extreme ultraviolet lithography
김지원
2001-09
Parameter extraction for 193 nm chemically amplified resist from refractive index change
안일신
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
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오혜근
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정영대
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안일신
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김대경
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홍주유
-Subject
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Lithography simulation
5
Chemically amplified resist
4
Simulation
3
CCSE
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Contact hole
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Navier-stokes equation
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Pellicle
3
Resist reflow
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Viscosity
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Analytical models
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2010 - 2018
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2000 - 2009
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1999 - 1999
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