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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 21-30 of 172 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2006-11
Investigation of optimum biasing and undercut for single trench alternating phase shift mask in 193 nm lithography
오혜근
2006-11
Chromeless phase lithography using scattering bars and zebra patterns
오혜근
2005-06
ArF photoresist parameter optimization for mask error enhancement factor reduction
오혜근
2005-05
The evaluation of aberration effects according to pattern shape and duty ratio
오혜근
2005-03
Contact hole reflow by finite element method
오혜근
2005-05
Simulation of thermal resist flow process
오혜근
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-Subject
20
Lithography
9
EUV lithography
9
lithography
8
ellipsometry
8
EUVL
7
EUV mask
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
6
Resist reflow process
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-Date issued
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2020 - 2021
27
2010 - 2019
141
2000 - 2009
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1999 - 1999
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