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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-9 of 9 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2008-11
Haze defects due to pellicle adhesive
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
정희준
2008-08
Ellipsometry for Pellicle-Covered Surface
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
안일신
2016-01
Impact of a deformed extreme ultraviolet pellicle in terms of the critical dimension uniformity
오혜근
2016-05
The impact of the residual stress on the EUV pellicle
김대경
2017-12
thermo-optical optimization of extreme-ultraviolet pellicles for future generations
오혜근
2016-05
The impact of the residual stress on the EUV pellicle
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
신동수
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오혜근
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김대경
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신동수
1
안일신
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정희준
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5
haze
4
ellipsometry
4
lithography
4
photomask
3
SCATTEROMETRY
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stress
2
EUVL
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LITHOGRAPHY
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mechanical
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residual
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