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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-10 of 109 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2018-10
Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity
박진구
2017-10
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
박진구
2017-01
Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs
박진구
2017-08
Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution
박진구
2017-00
Preparation of a high hydrophobic aluminium surface by double zincating process
박진구
2017-10
Novel method for nano-surface analysis of Cu CMP chemicals by AFM and microfluidic chip system
박진구
2017-10
Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node
박진구
2017-00
A novel cleaning approach to remove the carbon contaminant from Ru surface of EUV mask
박진구
2017-00
Characterization of ammonium silicate residue during Polysilazane (PSZ) dry etching in NF3/H2O gas chemistry
박진구
2017-00
Modification of DHF for removal of metals from silicon wafer
박진구
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CMP
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Fixed abrasive pad
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Megasonic cleaning
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Pellicle
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Ceria
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Diamond
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Lapping
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Pad debris
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Chemical mechanical planarization...
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