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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 261-264 of 264 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2023-08
Investigation of Selective Wet Etching of SiGe Substrates for High-Performance Device Manufacturing
박진구
2023-03-22
Effect of ammonium halide salts on wet chemical nanoscale etching and polishing of InGaAs surfaces for advanced CMOS devices
박진구
2023-04-14
Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application
박진구
2023-05-19
Acoustic power dependent detachment of PSL particles adhered to glass surfaces by dissolved gas and anionic surfactant in an ultrasonic field
박진구
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CMP
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Particle removal
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Post CMP cleaning
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Cu CMP
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Megasonic cleaning
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AFM
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Benzotriazole
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