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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-6 of 6 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2021-02
Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics
박진구
2021-12
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
박진구
2018-10
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
박진구
2010-11
The removal of nanoparticles from sub-micron trenches using megasonics
박진구
2017-12
Adhesion and removal behavior of particulate contaminants from EUV mask materials
박진구
2014-07
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
박진구
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Particle removal
2
Acoustic cavitation
2
EUV mask
2
Pattern damage
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Acoustic bubble cavitation
1
Acoustic bubble growth rate
1
Anionic Surfactant
1
Cleaning
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Dissolved gas
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Effect of power on particle remov...
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2020 - 2021
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2010 - 2019
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