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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-3 of 3 (Search time: 0.001 seconds).
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2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
박진구
2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
박진구
2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
박진구
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Brush skin layer
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Ce-O-Si bonding
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Ce-O-Si bonding, Colloidal Ceria
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Ceria abrasive contamination
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Cleaning efficiency
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Oxide CMP
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STI CMP
-Date issued
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2022
2
2021
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