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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-8 of 8 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2014-07
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
박진구
2014-06
Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution
박진구
2014-11
Investigation of Cu-BTA complex formation and removal on various Cu surface conditions
박진구
2014-11
The effect of fluid pH for 2-body lapping process
박진구
2014-11
Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP)
박진구
2014-03
Effect of Silicon Dioxide Hardness on Scratches in Interlevel Dielectric Chemical-Mechanical Polishing
박진구
2014-02
Abrasive and additive interactions in high selectivity STI CMP slurries
박진구
2014-02
Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography
박진구
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CMP
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Acoustic bubble growth rate
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Acoustic cavitation
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Amino acids
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Benzotriazole
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Ceria
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Cesium hydroxide
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Chatter Mark
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DIO3 cleaning
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Ethylene glycol
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