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Issue DateTitleAuthor(s)
2015-07Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling정진욱; Lee, Hyo-Chang; Chung, Chin-Wook
2015-07Relatively high plasma density in low pressure inductive discharges정진욱; Kang, Hyun-Ju; Kim, Yu-Sin; Chung, Chin-Wook
2015-07Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]정진욱; Kim, June Young; Kim, Young-Cheol; Kim, Yu-Sin; Chung, Chin-Wook
2015-06Pulsed plasma measurement method using harmonic analysis정진욱; Kim, Yu-Sin; Kim, Dong-Hwan; Lee, Hyo-Chang; Chung, Chin-Wook
2015-07Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas정진욱; Han, Duksun; Lee, Hyo-Chang; Bang, Jin-Young; Chung, Chin-Wook; Moon, Se Youn
2015-07Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma정진욱; Kim, Ju-Ho; Kim, Young-Cheol; Chung, Chin-Wook
2015-07Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma정진욱; Oh, Seung-Ju; Lee, Hyo-Chang; Chung, Chin-Wook
2015-03E-H heating mode transition in inductive discharges with different antenna sizes정진욱; Lee, Hyo-Chang; Chung, Chin-Wook
2015-04Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas정진욱; Kim, Hyun Jun; Hwang, Hye Ju; Kim, Dong Hwan; Cho, Jeong Hee; Chae, Hee Sun; Chung, Chin-Wook
2015-02Electron heating and control of electron energy distribution for the enhancement of the plasma ashing processing정진욱; Lee, Hyo-Chang; Chung, Chin-Wook