Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
- Title
- Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
- Author
- 정진욱
- Keywords
- Plasma density; Heating; Coils; Kinetic theory; Plasma measurements; Discharges
- Issue Date
- 2011-11
- Publisher
- IEEE
- Citation
- IEEE Transactions On Plasma Science, 2011, 39(11), P.2536-2537
- Abstract
- Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics.
- URI
- http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NART66006516http://hdl.handle.net/20.500.11754/51886
- ISSN
- 1939-9375; 0093-3813
- DOI
- 10.1109/TPS.2011.2135382
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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