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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 11-20 of 21 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2015-07
Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]
정진욱
2015-07
Relatively high plasma density in low pressure inductive discharges
정진욱
2015-06
Pulsed plasma measurement method using harmonic analysis
정진욱
2015-07
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
정진욱
2015-07
Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
정진욱
2015-07
Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma
정진욱
2015-10
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
정진욱
2015-12
A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma
정진욱
2015-12
Real-time dielectric-film thickness measurement system for plasma processing chamber wall monitoring
정진욱
2015-12
The sheath effect on the floating harmonic method
정진욱
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-Subject
4
RF DISCHARGE
3
DENSITY
3
ELECTRON-ENERGY DISTRIBUTION
3
GLOBAL-MODEL
3
POWER
2
ANTENNA
2
AR
2
ARGON
2
ARGON ATOMS
2
CALCULATED CROSS-SECTIONS
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