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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-10 of 10 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2016-12
Global model including multistep ionizations in helium plasmas
정진욱
2017-01
A study on plasma parameters in Ar/SF6 inductively coupled plasma
정진욱
2013-08
Effects of capacitor termination to an antenna coil on the plasma parameters in a radio frequency inductively coupled plasma
정진욱
2012-05
Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias
정진욱
2015-03
E-H heating mode transition in inductive discharges with different antenna sizes
정진욱
2015-07
Relatively high plasma density in low pressure inductive discharges
정진욱
2015-07
Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma
정진욱
2013-03
Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases
정진욱
2011-09
A plasma diagnostic technique using a floating probe for the dielectric deposition process
정진욱
2019-08
Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma
정진욱
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DISCHARGE
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COUPLED PLASMA
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DISCHARGES
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INDUCTIVELY-COUPLED PLASMA
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MODEL
2
POWER
2
TRANSITION
1
AR
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ARGON DISCHARGE
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