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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-7 of 7 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2013-08
Electron density and electron temperature measurement in a bi-Maxwellian electron distribution using a derivative method of Langmuir probes
정진욱
2011-01
Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy
정진욱
2015-06
Pulsed plasma measurement method using harmonic analysis
정진욱
2013-03
Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases
정진욱
2014-07
Enhanced Plasma Uniformity in RF Plasma With Side Multihole
정진욱
2020-03
Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
정진욱
2019-08
Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma
정진욱
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CROSS-SECTIONS
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ELECTRON-ENERGY DISTRIBUTION
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Capacitively coupled plasma (CCP)
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COLLISIONS
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DAMAGE
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