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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-6 of 6 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2015-03
E-H heating mode transition in inductive discharges with different antenna sizes
정진욱
2015-07
Relatively high plasma density in low pressure inductive discharges
정진욱
2016-06
Discharge dynamics and plasma density recovery by on/off switches of additional gas
정진욱
2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
2012-12
Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge
정진욱
2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
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ELECTRON-ENERGY DISTRIBUTION
2
ENERGY
2
POWER
2
SILICON DIOXIDE
2
SUBCUTANEOUS OXIDATION
1
ENERGY DISTRIBUTION
1
GAAS
1
HE
1
HEATING-MODE TRANSITION
1
HELIUM
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