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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 71-80 of 122 (Search time: 0.004 seconds).
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Issue Date
Title
Author(s)
2015-07
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
정진욱
2015-07
Control of Spatial Power Deposition by Wireless Power Transfer Method Applicable to Inductively Coupled Plasma
정진욱
2015-07
Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma
정진욱
2015-10
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
정진욱
2016-06
Control of the floating potential using dual-frequency
정진욱
2016-08
The radio-frequency fluctuation effect on the floating harmonic method
정진욱
2016-06
Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma
정진욱
2016-06
Discharge dynamics and plasma density recovery by on/off switches of additional gas
정진욱
2013-10
Transition of electron kinetics in weakly magnetized inductively coupled plasmas
정진욱
2013-03
Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases
정진욱
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-Subject
11
DISCHARGE
11
TRANSITION
10
ELECTRON-ENERGY DISTRIBUTION
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Inductively coupled plasma
10
RF DISCHARGE
7
DISCHARGES
7
GLOBAL-MODEL
6
COUPLED PLASMA
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DENSITY
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ENERGY DISTRIBUTION FUNCTION
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