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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Issue Date
Title
Author(s)
2019-10
High efficient plasma generation in an inductively coupled plasma using a passive resonant antenna
정진욱
2019-08
Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma
정진욱
2019-09
Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma
정진욱
2019-12
Measurement of the electron energy distribution function in CO2 inductively coupled plasma
정진욱
2019-11
Experimental comparative analysis on series and parallel antenna in an inductively coupled plasma
정진욱
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HYSTERESIS
1
ARGON DISCHARGE
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DISCHARGES
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DISSOCIATION
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E TRANSITION
1
ELECTRON-ENERGY DISTRIBUTION
1
ELECTRON-ENERGY-DISTRIBUTION
1
FREQUENCY
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high efficient discharge
1
inductively coupled plasma source
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