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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Issue Date
Title
Author(s)
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
안진호
2016-03
스핀코터를 이용한 박막의 기계적 안정성 평가
안진호
2016-03
EUV pellicle 의 standoff 거리에 따른 이미지 전사 특성 평가
안진호
2016-03
물중탕을 이용한 대면적 SiNx EUV 펠리클 제작
안진호
2022-04
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
안진호
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EUVL
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coherent scattering microscopy (CSM)
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emissivity
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EUV lithography
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grain size
1
imaging performance
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Lorentz-Drude model
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manufacturing process
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Mask defect control
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mechanical stability
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2022
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