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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-8 of 8 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2011-11
Carbon Contamination Analysis and Its Effect on Extreme Ultra Violet Mask Imaging Performance Using Coherent Scattering Microscopy/In-Situ Accelerated Contamination System
안진호
2011-11
Carbon contamination of EUV mask and its effect on CD performance
안진호
2011-12
Fabrication of 2D photonic crystal assisted Y2O3:Eu3+ thin-film phosphors by direct nano-imprinting
안진호
2011-06
Nanosize Patterning with Nanoimprint Lithography Using Poly(vinyl alcohol) Transfer Layer
안진호
2011-06
Characteristics of CVD graphene nanoribbon formed by a ZnO nanowire hardmask
안진호
2011-12
Structure, Raman, and photoluminescence properties of SnO2/MgO core-shell nanowires
안진호
2011-03
Improved electrical properties of Pt/HfO2/Ge using in situ water vapor treatment and atomic layer deposition
안진호
2011-01
Fabrication of trench nanostructures for extreme ultraviolet lithography masks by atomic force microscope lithography
안진호
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EUVL
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Reflectivity
1
ABSORBER
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ANODIZATION LITHOGRAPHY
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Carbon Contamination
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Carbon contamination
1
Coherent scattering microscopy
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CSM
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efficiency map
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ELECTRONICS
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