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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 31-40 of 103 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2011-06
Nanosize Patterning with Nanoimprint Lithography Using Poly(vinyl alcohol) Transfer Layer
안진호
2011-06
Characteristics of CVD graphene nanoribbon formed by a ZnO nanowire hardmask
안진호
2014-08
Attenuated phase-shift mask for mitigation of photon shot noise effect in contact hole pattern for extreme ultraviolet lithography
안진호
2012-12
The synthesis of crystalline SnO2 whiskers via a metalorganic chemical vapor deposition process
안진호
2014-06
Dielectric function of Si1-xGex films grown on silicon-on-insulator substrates
안진호
2016-09
극자외선 리소그라피에서의Sub-resolution assist feature를 이용한 근접효과보정
안진호
2016-09
EUV 펠리클 투과도에 따른 이미지 전사 특성 분석
안진호
2016-09
Fabrication of Fe3O4-ZnO core-shell nanoparticles by rotational atomic layer deposition and their multi-functional properties
안진호
2016-09
Phase Shift Mask to Compensate for Mask 3D Effect in High-Numerical-Aperture Extreme Ultraviolet Lithography
안진호
2016-09
Sub-Resolution Assist Feature in Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography
안진호
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EUVL
5
EUV pellicle
5
FILMS
4
Atomic layer deposition
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atomic layer deposition
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EUV
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EUV lithography
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Pellicle
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ANGLE
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Core-shell
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-Date issued
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2020 - 2022
88
2011 - 2019
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