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Effect of Acoustic Cavitation on Dissolved Gases and Their Characterization During Megasonic Cleaning

Title
Effect of Acoustic Cavitation on Dissolved Gases and Their Characterization During Megasonic Cleaning
Author
박진구
Issue Date
2011-10
Publisher
Pennington, N.J.; Electrochemical Society
Citation
ECS Transactions, Semiconductor Cleaning Science and Technology 12, SCST 12. ECS Transactions, 2011, 41(5),101-107
URI
http://ecst.ecsdl.org/content/41/5/101.full.pdf+htmlhttp://hdl.handle.net/20.500.11754/51540
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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