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dc.contributor.author정두석-
dc.date.accessioned2018-03-23T05:58:17Z-
dc.date.available2018-03-23T05:58:17Z-
dc.date.issued2013-11-
dc.identifier.citationACS Applied Matetials & Interfaces, 2013, 5(22), P.11631-11640en_US
dc.identifier.issn1944-8244-
dc.identifier.urihttps://pubs.acs.org/doi/10.1021/am403066k-
dc.description.abstractNanocrystalline diamond (NCD) thin film growth was systematically investigated for application for the thin film waveguide mode resonance sensor. The NCD thin film was grown on the Si wafer or on the SiO2-coated sapphire substrate using the hot filament chemical vapor deposition (HFCVD). The structural/optical properties of the samples were characterized by the high-resolution scanning electron microscopy (HRSEM), high-resolution transmission electron microscopy (HRTEM), energy dispersive X-ray spectroscopy (EDS), near edge X-ray absorption fine structure (NEXAFS), X-ray diffraction (XRD), and ultraviolet visible (UV-vis) spectroscopy. The waveguide modes of the NCD layer were studied by prism coupler technique using laser (wavelength: 632.8 nm) with varying incident angle. A novel aspect was disclosed in the grain size dependence on the growth temperature at the relatively low methane concentration in the precursor gas, which was important for optical property: the grain size increased with decreasing growth temperature, which was contrary to the conventional knowledge prevailing in the microcrystalline diamond (MCD) domain. We have provided discussions to reconcile such observation. An optical waveguide mode resonance was demonstrated in the visible region using the microstructure-controlled transparent NCD thin film waveguide, which provided a strong potential for the waveguide mode resonance sensor applications.en_US
dc.description.sponsorshipThis work was supported by an institutional program grant (2E24012) from Korea Institute of Science and Technology. This work was also supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy, Republic of Korea.en_US
dc.language.isoenen_US
dc.publisherAmer Chemical SOCen_US
dc.subjectnanocrystalline diamonden_US
dc.subjectgrain growthen_US
dc.subjectnucleationen_US
dc.subjectHFCVDen_US
dc.subjectwaveguide mode resonanceen_US
dc.subjectoptical propertyen_US
dc.titleNovel Aspect in Grain Size Control of Nanocrystalline Diamond Film for Thin Film Waveguide Mode Resonance Sensor Applicationen_US
dc.typeArticleen_US
dc.identifier.doi10.1021/am403066k-
dc.relation.journalACS APPLIED MATERIALS & INTERFACES-
dc.contributor.googleauthorLee, Hak-Joo-
dc.contributor.googleauthorLee, Kyeong-Seok-
dc.contributor.googleauthorCho, Jung-Min-
dc.contributor.googleauthorLee, Taek-Sung-
dc.contributor.googleauthorKim, Inho-
dc.contributor.googleauthorJeong, Doo Seok-
dc.contributor.googleauthorLee, Wook-Seong-
dc.relation.code2013008623-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MATERIALS SCIENCE AND ENGINEERING-
dc.identifier.piddooseokj-
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COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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