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Spatially digitized tactile pressure sensors with tunable sensitivity and sensing range

Title
Spatially digitized tactile pressure sensors with tunable sensitivity and sensing range
Author
이승백
Keywords
tactile sensor; carbon nanotube; PDMS
Issue Date
2014-10
Publisher
IOP PUBLISHING
Citation
NANOTECHNOLOGY, 25권, 42호, 논문번호 425504
Abstract
When developing an electronic skin with touch sensation, an array of tactile pressure sensors with various ranges of pressure detection need to be integrated. This requires low noise, highly reliable sensors with tunable sensing characteristics. We demonstrate the operation of tactile pressure sensors that utilize the spatial distribution of contact electrodes to detect various ranges of tactile pressures. The device consists of a suspended elastomer diaphragm, with a carbon nanotube thin-film on the bottom, which makes contact with the electrodes on the substrate with applied pressure. The electrodes separated by set distances become connected in sequence with tactile pressure, enabling consecutive electrodes to produce a signal. Thus, the pressure is detected not by how much of a signal is produced but by which of the electrodes is registering an output. By modulating the diaphragm diameter, and suspension height, it was possible to tune the pressure sensitivity and sensing range. Also, adding a fingerprint ridge structure enabled the sensor to detect the periodicity of sub-millimeter grating patterns on a silicon wafer.
URI
http://dx.doi.org/10.1088/0957-4484/25/42/425504http://hdl.handle.net/20.500.11754/51043
ISBN
1361-6528
ISSN
0957-4484
DOI
10.1088/0957-4484/25/42/425504
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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