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Multifunctional Ru-AlN heating resistor films for high efficiency inkjet printhead

Title
Multifunctional Ru-AlN heating resistor films for high efficiency inkjet printhead
Author
박진성
Keywords
Thermal inkjet printer; Platinum group metals; Plasma-enhanced atomic layer deposition; Multifunctional thin films
Issue Date
2014-05
Publisher
SPRINGER, VAN GODEWIJCKSTRAAT 30, 3311 GZ DORDRECHT, NETHERLANDS
Citation
JOURNAL OF ELECTROCERAMICS, 권: 32, 호: 2-3, 페이지: 240-245
Abstract
Ru-AlN thin films were suggested as a novel multifunctional heating resistor film for non-passivated type thermal inkjet printer devices. Ru-AlN thin films were prepared by plasma-enhanced atomic layer deposition in order to intermix Ru and AlN precisely. When the Ru intermixing ratios were optimized, Ru-AlN films showed a favorable electrical resistivity (from 490.9 to 75.3 mu Omega cm) and minimized temperature coefficient of resistance (TCR) values (from 335 to 360 ppm/K). Moreover, the Ru-AlN films showed a strong oxidation resistant as compared with commercially used TaN0.8 films because the prepared Ru-AlN thin films had a typical nanocomposite structure. By applying electrical pulses to the heater device using Ru-AlN thin films for a Joule heating, a reliable operation was also proven.
URI
https://link.springer.com/article/10.1007%2Fs10832-013-9880-2http://hdl.handle.net/20.500.11754/49725
ISSN
1385-3449; 1573-8663
DOI
10.1007/s10832-013-9880-2
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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