Repository at Hanyang UniversityGRADUATE SCHOOL[S](대학원)ETC
475 0

Full metadata record

DC FieldValueLanguage
dc.contributor.author박진구-
dc.date.accessioned2018-03-20T01:29:48Z-
dc.date.available2018-03-20T01:29:48Z-
dc.date.issued2014-02-
dc.identifier.citationUltrasonics - Sonochemistry, July 2014 21, 4, 1496-1503en_US
dc.identifier.issn1350-4177-
dc.identifier.urihttps://www.sciencedirect.com/science/article/pii/S1350417714000327-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/49259-
dc.description.sponsorshipChanges in the cavitation intensity of gases dissolved in water, including H2, N2, and Ar, have been established in studies of acoustic bubble growth rates under ultrasonic fields. Variations in the acoustic properties of dissolved gases in water affect the cavitation intensity at a high frequency (0.83MHz) due to changes in the rectified diffusion and bubble coalescence rate. It has been proposed that acoustic bubble growth rates rapidly increase when water contains a gas, such as hydrogen faster single bubble growth due to rectified diffusion, and a higher rate of coalescence under Bjerknes forces. The change of acoustic bubble growth rate in rectified diffusion has an effect on the damping constant and diffusivity of gas at the acoustic bubble and liquid interface. It has been suggested that the coalescence reaction of bubbles under Bjerknes forces is a reaction determined by the compressibility and density of dissolved gas in water associated with sound velocity and density in acoustic bubbles. High acoustic bubble growth rates also contribute to enhanced cavitation effects in terms of dissolved gas in water. On the other hand, when Ar gas dissolves into water under ultrasound field, cavitation behavior was reduced remarkably due to its lower acoustic bubble growth rate. It is shown that change of cavitation intensity in various dissolved gases were verified through cleaning experiments in the single type of cleaning tool such as particle removal and pattern damage based on numerically calculated acoustic bubble growth rates.en_US
dc.language.isoenen_US
dc.publisherElsevier B.Ven_US
dc.subjectMegasonic cleaningen_US
dc.subjectAcoustic cavitationen_US
dc.subjectGas dissolved wateren_US
dc.subjectParticle removalen_US
dc.subjectAcoustic bubble growth rateen_US
dc.subjectPattern damageen_US
dc.titleEffect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaningen_US
dc.typeArticleen_US
dc.relation.no4-
dc.relation.volume21-
dc.identifier.doi10.1016/j.ultsonch.2014.01.012-
dc.relation.page1496-1503-
dc.relation.journalULTRASONICS SONOCHEMISTRY-
dc.contributor.googleauthorKang, Bong-Kyun-
dc.contributor.googleauthorKim, Min-Su-
dc.contributor.googleauthorPark, Jin-Goo-
dc.relation.code2014040574-
dc.sector.campusS-
dc.sector.daehakGRADUATE SCHOOL[S]-
dc.sector.departmentDEPARTMENT OF BIONANOTECHNOLOGY-
dc.identifier.pidjgpark-
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > ETC
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show simple item record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE