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Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning

Title
Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
Author
박진구
Keywords
Megasonic cleaning; Acoustic cavitation; Gas dissolved water; Particle removal; Acoustic bubble growth rate; Pattern damage
Issue Date
2014-02
Publisher
Elsevier B.V
Citation
Ultrasonics - Sonochemistry, July 2014 21, 4, 1496-1503
URI
https://www.sciencedirect.com/science/article/pii/S1350417714000327http://hdl.handle.net/20.500.11754/49259
ISSN
1350-4177
DOI
10.1016/j.ultsonch.2014.01.012
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > ETC
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