Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2018-03-17T04:33:51Z | - |
dc.date.available | 2018-03-17T04:33:51Z | - |
dc.date.issued | 2012-02 | - |
dc.identifier.citation | Electrochemical and solid-state letters, 2012, 15(4), P.H133-H135, 3P. | en_US |
dc.identifier.issn | 1099-0062 | - |
dc.identifier.issn | 1944-8775 | - |
dc.identifier.uri | http://esl.ecsdl.org/content/15/4/H133 | - |
dc.description.abstract | RF-sputtered ZnO films were annealed under various annealing ambient atmospheres, including a vacuum, air, and water vapor. The physical and electrical properties of ZnO films annealed in various ambient atmospheres, were studied as a function of annealing temperature. The carrier concentration was dramatically increased, and the mobility was decreased when the films were annealed in a vacuum or water vapor. Even though the annealing ambient atmosphere and temperature were different, the preferred orientation and crystallization of the annealed ZnO films are maintained. However, two distinct band edge states below the conduction band, observed by spectroscopic ellipsometry measurement, undergo a thermal change as a function of annealing ambient atmosphere and these changes are correlated to changes in carrier concentration and mobility. (C) 2012 The Electrochemical Society. | en_US |
dc.description.sponsorship | his research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2011-0004901). | en_US |
dc.language.iso | en | en_US |
dc.publisher | ELECTROCHEMICAL SOCIETY AND INSTITUTE OF ELECTRONICS ENGINEERS | en_US |
dc.subject | THIN-FILM | en_US |
dc.subject | TEMPERATURE | en_US |
dc.subject | TRANSPARENT | en_US |
dc.subject | DEFECTS | en_US |
dc.title | Thermal Evolution of Band Edge States in ZnO Film as a Function of Annealing Ambient Atmosphere | en_US |
dc.type | Article | en_US |
dc.relation.no | 4 | - |
dc.relation.volume | 15 | - |
dc.identifier.doi | 10.1149/2.005205esl | - |
dc.relation.page | 133-135 | - |
dc.relation.journal | ELECTROCHEMICAL AND SOLID STATE LETTERS | - |
dc.contributor.googleauthor | Park, Hyun-woo | - |
dc.contributor.googleauthor | Chung, Kwun-Bum | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.contributor.googleauthor | Lee, Ju Ho | - |
dc.contributor.googleauthor | 박현우 | - |
dc.contributor.googleauthor | 정권범 | - |
dc.contributor.googleauthor | 박진성 | - |
dc.contributor.googleauthor | 이주호 | - |
dc.relation.code | 2012202779 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
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