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Colorimetric polydiacetylene for plasma diagnostics

Title
Colorimetric polydiacetylene for plasma diagnostics
Author
이효창
Keywords
COLOR TRANSITION; DIACETYLENE; THERMOCHROMISM; CHEMOSENSORS; LIPOSOME; CIRCUITS; VESICLES; LAYER
Issue Date
2014-07
Publisher
Elsevier Science SA
Citation
Sensors and Actuators Chemical B, 2014, P.130-134
Abstract
Low temperature reactive plasmas have been widely used in various nanofabrication processes. We have developed a large area wafer-type colorimetric plasma diagnostic system based on a polymerizable supramolecular sensor (PSS). The supramolecular diacetylene based PSS allows efficient mapping of the ion density distribution. The colour change of the thin PSS film was found to be very sensitive to plasma and afforded a real time colorimetric and fluorometric monitoring of spatial ion density distribution. This PSS method, which does not require electrical circuits and batteries, will find great utility in the field of plasma diagnostics.
URI
https://www.sciencedirect.com/science/article/pii/S0925400514007874?via%3Dihub
ISSN
0925-4005
DOI
10.1016/j.snb.2014.06.098
Appears in Collections:
RESEARCH INSTITUTE[S](부설연구소) > ETC
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