22 0

Process Optimization of Integrated SiCr Thin-Film Resistor for High-Performance Analog Circuits

Title
Process Optimization of Integrated SiCr Thin-Film Resistor for High-Performance Analog Circuits
Author
권오경
Keywords
Integrated thin-film resistor; low-pass filter; mismatch; silicon chromium; temperature coefficient of resistance; TFR dummy pattern; TFR
Issue Date
2014-01
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON ELECTRON DEVICES; JAN 2014, 61 1, p8-p14
Abstract
We investigated the characteristic variation of an integrated thin-film resistor (TFR), which is composed of silicon chromium (SiCr), according to process conditions and its effects on analog circuits. To improve TFR properties, such as temperature coefficient of resistance (TCR) and mismatch, the integrated TFR was examined under various process conditions. First, the sputtering power and the annealing temperature were optimized to control the TCR property. Secondly, the etching time and the dummy pattern were optimized to enhance the mismatch property. The measured TCR is -3.9 ppm/degrees C and the calculated mismatch slope from the standard deviation of resistance mismatch is 0.34%.mu m. These results show that the fabricated TFR had near-zero TCR and a high matching constant. To verify the TFRs effects on analog circuits, low-pass filters (LPFs) were fabricated and measured as a test vehicle; the use of the optimized resistor considerably improved the performance of the resulting LPFs.
URI
http://ieeexplore.ieee.org/abstract/document/6670772/http://hdl.handle.net/20.500.11754/46704
ISSN
0018-9383
DOI
10.1109/TED.2013.2289885
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE