Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2018-03-14T03:55:34Z | - |
dc.date.available | 2018-03-14T03:55:34Z | - |
dc.date.issued | 2014-07 | - |
dc.identifier.citation | 한국재료학회지, 2014, 24(8), P.429-433 | en_US |
dc.identifier.issn | 2287-7258 | - |
dc.identifier.issn | 1225-0562 | - |
dc.identifier.uri | http://db.koreascholar.com/Article?code=297586 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/46526 | - |
dc.description.abstract | As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing and the pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becoming more important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaning process using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes a two-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate the particle removal efficiency by means of two-phase flow cleaning, silica particles 1.5μm in size were contaminated onto a six-inch silicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water and nitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and the substrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained high efficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phase-flow cleaning and air-knife processes. | en_US |
dc.description.sponsorship | This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIP) (No. 2008-0061891). | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국재료학회 | en_US |
dc.subject | flat panel display | en_US |
dc.subject | two-phase flow nozzle | en_US |
dc.subject | air-knife | en_US |
dc.subject | particle removal | en_US |
dc.title | 이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발 | en_US |
dc.type | Article | en_US |
dc.relation.no | 8 | - |
dc.relation.volume | 24 | - |
dc.identifier.doi | 10.3740/MRSK.2014.24.8.429 | - |
dc.relation.page | 429-433 | - |
dc.relation.journal | 한국재료학회지 | - |
dc.contributor.googleauthor | 김민수 | - |
dc.contributor.googleauthor | 김향란 | - |
dc.contributor.googleauthor | 김현태 | - |
dc.contributor.googleauthor | 박진구 | - |
dc.contributor.googleauthor | Kim, Min-Su | - |
dc.contributor.googleauthor | Kim, Hyang-Ran | - |
dc.contributor.googleauthor | Kim, Hyun-Tae | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2014001196 | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | jgpark | - |
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