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이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발

Title
이류체 노즐을 이용한 FPD 세정시스템 및 공정 개발
Author
박진구
Keywords
flat panel display; two-phase flow nozzle; air-knife; particle removal
Issue Date
2014-07
Publisher
한국재료학회
Citation
한국재료학회지, 2014, 24(8), P.429-433
Abstract
As the fabrication technology used in FPDs(flat-panel displays) advances, the size of these panels is increasing and the pattern size is decreasing to the um range. Accordingly, a cleaning process during the FPD fabrication process is becoming more important to prevent yield reductions. The purpose of this study is to develop a FPD cleaning system and a cleaning process using a two-phase flow. The FPD cleaning system consists of two parts, one being a cleaning part which includes a two-phase flow nozzle, and the other being a drying part which includes an air-knife and a halogen lamp. To evaluate the particle removal efficiency by means of two-phase flow cleaning, silica particles 1.5μm in size were contaminated onto a six-inch silicon wafer and a four-inch glass wafer. We conducted cleaning processes under various conditions, i.e., DI water and nitrogen gas at different pressures, using a two-phase-flow nozzle with a gap distance between the nozzle and the substrate. The drying efficiency was also tested using the air-knife with a change in the gap distance between the air-knife and the substrate to remove the DI water which remained on the substrate after the two-phase-flow cleaning process. We obtained high efficiency in terms of particle removal as well as good drying efficiency through the optimized conditions of the two-phase-flow cleaning and air-knife processes.
URI
http://db.koreascholar.com/Article?code=297586http://hdl.handle.net/20.500.11754/46526
ISSN
2287-7258; 1225-0562
DOI
10.3740/MRSK.2014.24.8.429
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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