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Role of the Surface Chemistry of Ceria Surfaces on Silicate Adsorption

Title
Role of the Surface Chemistry of Ceria Surfaces on Silicate Adsorption
Author
백운규
Keywords
ceria; surface chemistry; adsorption isotherm; DFT; calculation; CMP
Issue Date
2014-05
Publisher
AMER CHEMICAL SOC, 1155 16TH ST, NW, WASHINGTON, DC 20036 USA
Citation
ACS APPLIED MATERIALS & INTERFACES, 권: 6, 호: 10, 페이지: 7388-7394
Abstract
Ceria nanoparticles (NPs) have been widely explored as a promising material in various fields. As synthesized under various physicochemical conditions, it exhibits the different surface chemistry. Here, the role of hydroxyl and nitrate group on ceria surface, formed under various physicochemical conditions, for the silicate adsorption was experimentally and theoretically investigated based on the adsorption isotherms and theoretical analyses using density functional theory (DFT) calculation. Experimental results acquired from adsorption isotherms with Freundlich model indicated that the nitrate group shows a much higher affinity with silicate than the hydroxyl groups. These phenomena were demonstrated through the theoretical approaches that exhibit the binding energy of the NO3-ceria (-4.383 eV) on the SiO2 surface being much higher than that of the OH-ceria (-3.813 eV). In good agreement with the experimental and the theoretical results based on adsorption properties, the results of chemical mechanical planarization (CMP) also show that the nitrate groups significantly enhance the removal of SiO2 than the hydroxyl groups. The results investigated in this study will provide researchers, studying the ceria NPs, with guidelines on the importance of exploring the surface chemistry of ceria.
URI
https://pubs.acs.org/doi/10.1021/am500816yhttp://hdl.handle.net/20.500.11754/46220
ISSN
1944-8244
DOI
10.1021/am500816y
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ENERGY ENGINEERING(에너지공학과) > Articles
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