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Long-Range Ordered Self-Assembly of Novel Acrylamide-Based Diblock Copolymers for Nanolithography and Metallic Nanostructure Fabrication

Title
Long-Range Ordered Self-Assembly of Novel Acrylamide-Based Diblock Copolymers for Nanolithography and Metallic Nanostructure Fabrication
Author
한양규
Keywords
novel diblock copolymers; direct self-assembly; nanolithography; metallic nanostructures
Issue Date
2014-05
Publisher
WILEY-V C H VERLAG GMBH, BOSCHSTRASSE 12, D-69469 WEINHEIM, GERMANY
Citation
ADVANCED MATERIALS, 권: 26, 호: 18, 페이지: 2894-2900
Abstract
Novel acrylamide-based hard-soft hybrid block copolymers generate high-quality nanolithographic patterns satisfying high-resolution, long-range ordering, low defect density, moderate etch selectivity, and easy pattern transfer onto a substrate. The resulting patterns can also be used as a scaffold for metallic nanostructures such as aligned nanowires and nanomeshes with extraordinary structural regularity.
URI
https://onlinelibrary.wiley.com/doi/abs/10.1002/adma.201305186
ISSN
0935-9648; 1521-4095
DOI
10.1002/adma.201305186
Appears in Collections:
COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > CHEMISTRY(화학과) > Articles
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