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dc.contributor.author신동수-
dc.date.accessioned2018-03-13T04:51:20Z-
dc.date.available2018-03-13T04:51:20Z-
dc.date.issued2011-01-
dc.identifier.citationPROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 2011, 7939, P.7939 2Ben_US
dc.identifier.issn0277-786X-
dc.identifier.urihttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7939/1/Measurement-of-nonuniform-bowing-in-GaN-sapphire-epi-wafers-and/10.1117/12.874127.short?SSO=1-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/45894-
dc.description.abstractWe present our approach to measure the profile of nonuniformly bent GaN epi-wafers grown on sapphire substrates. By using a laser displacement sensor, the position of the epi-wafer is accurately measured and mapped. From the measured profile data, analysis of stress distributions over the nonuniformly bent wafer is performed by using a theoretical model. We show the result of theoretical analysis of how the stress tensors distribute over a wafer. The estimated stress tensors are related with optical properties such as photoluminescence of the wafer.en_US
dc.language.isoenen_US
dc.publisherInternational Society for Optical Engineeringen_US
dc.subjectSemiconducting wafersen_US
dc.subjectLight emitting diodesen_US
dc.subjectGallium nitrideen_US
dc.subjectData modelingen_US
dc.subjectSapphireen_US
dc.subjectSensorsen_US
dc.subjectStress analysisen_US
dc.titleMeasurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical modelen_US
dc.title.alternativesapphire epi-wafers and subsequent stress analysis by using a theoretical modelen_US
dc.typeArticleen_US
dc.relation.volume7939-
dc.identifier.doi10.1117/12.874127-
dc.relation.page79392B-1-79392B-9-
dc.contributor.googleauthorJang, Y.-
dc.contributor.googleauthorJang, D.-H.-
dc.contributor.googleauthorShim, J.-I.-
dc.contributor.googleauthorShin, D.-S-
dc.sector.campusS-
dc.sector.daehakGRADUATE SCHOOL[S]-
dc.sector.departmentDEPARTMENT OF BIONANOTECHNOLOGY-
dc.identifier.piddshin-
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GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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