Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 신동수 | - |
dc.date.accessioned | 2018-03-13T04:51:20Z | - |
dc.date.available | 2018-03-13T04:51:20Z | - |
dc.date.issued | 2011-01 | - |
dc.identifier.citation | PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 2011, 7939, P.7939 2B | en_US |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7939/1/Measurement-of-nonuniform-bowing-in-GaN-sapphire-epi-wafers-and/10.1117/12.874127.short?SSO=1 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/45894 | - |
dc.description.abstract | We present our approach to measure the profile of nonuniformly bent GaN epi-wafers grown on sapphire substrates. By using a laser displacement sensor, the position of the epi-wafer is accurately measured and mapped. From the measured profile data, analysis of stress distributions over the nonuniformly bent wafer is performed by using a theoretical model. We show the result of theoretical analysis of how the stress tensors distribute over a wafer. The estimated stress tensors are related with optical properties such as photoluminescence of the wafer. | en_US |
dc.language.iso | en | en_US |
dc.publisher | International Society for Optical Engineering | en_US |
dc.subject | Semiconducting wafers | en_US |
dc.subject | Light emitting diodes | en_US |
dc.subject | Gallium nitride | en_US |
dc.subject | Data modeling | en_US |
dc.subject | Sapphire | en_US |
dc.subject | Sensors | en_US |
dc.subject | Stress analysis | en_US |
dc.title | Measurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical model | en_US |
dc.title.alternative | sapphire epi-wafers and subsequent stress analysis by using a theoretical model | en_US |
dc.type | Article | en_US |
dc.relation.volume | 7939 | - |
dc.identifier.doi | 10.1117/12.874127 | - |
dc.relation.page | 79392B-1-79392B-9 | - |
dc.contributor.googleauthor | Jang, Y. | - |
dc.contributor.googleauthor | Jang, D.-H. | - |
dc.contributor.googleauthor | Shim, J.-I. | - |
dc.contributor.googleauthor | Shin, D.-S | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | dshin | - |
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