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A Precision Mismatch Measurement Technique for Integrated Capacitor Array Using a Switched Capacitor Amplifier

Title
A Precision Mismatch Measurement Technique for Integrated Capacitor Array Using a Switched Capacitor Amplifier
Author
권오경
Keywords
Capacitor array mismatch measurement; correlated double sampling (CDS); short-term repeatability; standard deviation of capacitance mismatch; switched capacitor amplifier
Issue Date
2013-05
Publisher
IEEE
Citation
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, MAY 2013, 26(2), P.226-p232
Abstract
This paper presents a precision mismatch measurement method to characterize an integrated capacitor array. Conventional mismatch measurement methods using floating gate capacitance measurement (FGCM) have measurement error due to the large input-referred noise and the small input signal range of the source follower. In order to improve the measurement accuracy, we propose a new measurement method using a parasitic-insensitive switched capacitor amplifier and the correlated double sampling (CDS) technique. The CDS technique eliminates the measurement error from parasitic capacitances, switching errors, and the offset voltage of the amplifier. In order to verify the proposed method, a test chip was fabricated using a 0.18-mu m CMOS process. The chip consists of a 4 x 16 metal-insulator-metal capacitor array and a measurement circuit. The measured standard deviation of the capacitance mismatch, sigma(Delta C-n/< C >), ranges from 0.0067% to 0.0130%, and the measured standard deviation of the short-term repeatability, sigma(Delta(Delta C-n/< C >)), is 0.0025%. These results show that the measurement accuracy of the proposed method is improved by ten times over that of the FGCM method.
URI
http://apps.webofknowledge.com/InboundService.do?customersID=LinksAMR&amp;mode=FullRecord&amp;IsProductCode=Yes&amp;product=WOS&amp;Init=Yes&amp;Func=Frame&amp;DestFail=http%3A%2F%2Fwww.webofknowledge.com&amp;action=retrieve&amp;SrcApp=PARTNER_APP&amp;SrcAuth=LinksAMR&amp;SID=D3avNMo4kHPc6xOFiRW&amp;UT=WOS%3A000318696700007http://hdl.handle.net/20.500.11754/45472
ISSN
0894-6507
DOI
10.1109/TSM.2013.2254731
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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