Effect of antenna size on electron kinetics in inductively coupled plasmas
- Title
- Effect of antenna size on electron kinetics in inductively coupled plasmas
- Author
- 이효창
- Keywords
- Antennas; Electron energy distribution functions; Inductively coupled plasma; Plasma pressure; Coils; ENERGY DISTRIBUTION FUNCTION; PRESSURE RF DISCHARGE; POWER DEPOSITION; POSITIVE-COLUMN; GAS-DISCHARGES; GLOW-DISCHARGE; TRANSITION; DENSITY; DISTRIBUTIONS; TEMPERATURE
- Issue Date
- 2013-10
- Publisher
- AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
- Citation
- PHYSICS OF PLASMAS, 2013, 20(10), P.101607-
- Abstract
- Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented. (C) 2013 AIP Publishing LLC.
- URI
- http://aip.scitation.org/doi/abs/10.1063/1.4823470http://hdl.handle.net/20.500.11754/44556
- ISSN
- 1070-664X; 1089-7674
- DOI
- 10.1063/1.4823470
- Appears in Collections:
- RESEARCH INSTITUTE[S](부설연구소) > ETC
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