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Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film

Title
Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
Author
전형탁
Keywords
ANATASE-TO-RUTILE; PHOTOCATALYTIC ACTIVITY; PARTICLE-SIZE; TIO2; TRANSFORMATION; DEPENDENCE
Issue Date
2012-12
Publisher
ELECTROCHEMICAL SOC INC, 65 SOUTH MAIN STREET, PENNINGTON, NJ 08534 USA
Citation
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 1, 4, Q63-Q69
Abstract
The photo-catalytic activities of TiO2 thin films grown by remote plasma atomic layer deposition (RPALD) were investigated as a function of grain size and crystal structure. As the deposition temperature increased, it was shown that grain size of the anatase phase in the as-deposited TiO2 thin films progressively decreased. When the TiO2 films grown by RPALD were annealed at 900 degrees C, the anatase TiO2 phase with relatively small grains provided large number of nucleation sites for formation of more stable rutile phase. On the other hand, the phase transition to rutile was retarded due to the reduction in grain boundaries in the case of the anatase TiO2 films with large grains. Thus, the anatase TiO2 phase with large grains has excellent thermal stability against the phase transition to rutile. Because the large grain boundary volume is a primary cause of degradation of photo-catalytic activity, the photo-catalytic activity of the TiO2 thin film was maximized when the anatase phase with large grains was formed in the TiO2 thin film. Therefore, RPALD can be effectively utilized to control the grain size of the as-deposited anatase TiO2 thin film with high thermal stability for potential application of photo-catalysts. (C) 2012 The Electrochemical Society.
URI
http://jss.ecsdl.org/content/1/4/Q63
ISSN
2162-8769
DOI
10.1149/2.001204jss
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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